Development of a MEMS-based Acceleration Sensing Module for Electronic Stability Program 2007-01-3578

This paper describes our development work for acceleration sensing modules for electronic stability program (ESP) applications. The accelerometer is fabricated using the unique sacrificial/bulk micromachining (SBM) process by us. The sensing modules are designed to measure low level accelerations accurately and be stable in an automotive environment. This paper describes the accelerometer design and fabrication, electronic circuits and PCB design, module assembly, and performances of the developed sensing module. The developed sensing module offers analog voltage output with ±1.5g dynamic range, 0.05% nonlinearity, >50Hz bandwidth and 1295mV/g scale factor. The module includes a CAN2.0A interface and yields good experimental performance when implemented on a CAN test server.