Most bucket type valvetrain engines use DLC coated tappet for low friction and fuel efficiency. However the requirements on coating robustness have been increased as the tribological environments have become more severe by use of low viscosity oil or higher engine output. In order to obtain higher coating efficiency and improved wear resistance, 5∼9 at.% Si doped DLC (Si-DLC) coated tappet has been developed using PACVD process. Thermal stability and wear resistance of Si-DLC were improved impressively than those of DLC, although mechanical properties such as hardness and adhesion were degradated. It seems that Si suppresses a graphitization of DLC and thin SixOy film on coating surface acts as a barrier to oxidation or flash heat.