New Uses of the Electron Microprobe Analyzer in Analysis of Integrated Circuits and Packages 680804
This paper describes the use of the electron microprobe analyzer as an analytical tool for microelectronic devices. A comprehensive description of the construction and working of the electron microprobe analyzer is first presented. Included is a brief description of some of the basic physical laws regarding X-ray generation and analysis.
Three major innovations which have made the probe the tool for microelectronic analysis are described in detail; these are: the electron beam scanning system, secondary electron display, and high resolution nondispersive energy analysis.
Several examples are shown Of how these techniques may be applied to microelectronic analysis.
Citation: Solomon, J. and Hitt, G., "New Uses of the Electron Microprobe Analyzer in Analysis of Integrated Circuits and Packages," SAE Technical Paper 680804, 1968, https://doi.org/10.4271/680804. Download Citation
Author(s):
J. L. Solomon, G. E. Hitt
Affiliated:
Federal Systems Div., International Business Machines Corp.
Pages: 9
Event:
Micro Electronic Packaging Conference
ISSN:
0148-7191
e-ISSN:
2688-3627
Also in:
SAE 1968 Transactions-V77-A
Related Topics:
Integrated circuits
Tools and equipment
Research and development
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