We developed amorphous alloy thin films having TCR(temperature coefficient of resistivity) less than ±5 ppm/°C for strain gauge applications. Thin film strain gauges are directly formed on metal substrates insulated with SiO2. These gauges have excellent aging stability at high temperature. The resistivity shows a drift in ▵R/R less than ±0.03% at 120°C in 1000 hours. We developed a pressure sensor and an acceleration sensor with high accuracy and reliability, employing these gauges.