Thin Film Strain Gauge Sensors for Automotive Applications

Paper #:
  • 930356

Published:
  • 1993-03-01
Citation:
Kato, Y. and Sumi, C., "Thin Film Strain Gauge Sensors for Automotive Applications," SAE Technical Paper 930356, 1993, https://doi.org/10.4271/930356.
Pages:
12
Abstract:
We developed amorphous alloy thin films having TCR(temperature coefficient of resistivity) less than ±5 ppm/°C for strain gauge applications. Thin film strain gauges are directly formed on metal substrates insulated with SiO2. These gauges have excellent aging stability at high temperature. The resistivity shows a drift in ▵R/R less than ±0.03% at 120°C in 1000 hours. We developed a pressure sensor and an acceleration sensor with high accuracy and reliability, employing these gauges.
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