An Integrated Silicon Bulk Micromachined Barometric Pressure Sensor for Engine Control Unit and External Mount

Paper #:
  • 970610

Published:
  • 1997-02-24
Citation:
Sooriakumar, K., Verma, R., Maudie, T., and Shah, M., "An Integrated Silicon Bulk Micromachined Barometric Pressure Sensor for Engine Control Unit and External Mount," SAE Technical Paper 970610, 1997, https://doi.org/10.4271/970610.
Pages:
9
Abstract:
An Integrated Barometric Absolute Pressure Sensor (IBAP) solution for barometric pressure sensing is presented here. The IBAP is a silicon bulk micromachined monolithic pressure sensor. This work includes an examination of the design, fabrication, temperature compensation, and testing aspects. In addition, options and issues related to the mounting of the IBAP device will be presented. Two techniques, including surface mounting the sensor on the engine control unit (ECU) PWB are discussed.
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