A Precision Yaw Rate Sensor in Silicon Micromachining

Paper #:
  • 980267

Published:
  • 1998-02-23
Citation:
Lutz, M., Marek, J., Maihöfer, B., Schubert, D. et al., "A Precision Yaw Rate Sensor in Silicon Micromachining," SAE Technical Paper 980267, 1998, https://doi.org/10.4271/980267.
Pages:
7
Abstract:
A new generation of production-ready dual function sensor which combines a yaw rate sensor with a linear accelerometer, based on silicon micromachining, is presented. The sensor is designed for mass production and high performance applications such as vehicle control systems. A combination of surface and bulk micromachining leads to an advantage in design, signal evaluation and packaging. This paper discusses the design of the sensing elements: the yaw rate sensor consists of two bulk micromachined oscillating masses each of which supports a surface micromachined accelerometer for detection of the coriolis force. The sensing element for the linear acceleration is a separate surface micromachined accelerometer. The electrodynamic actuation and high Q-value of the oscillator allow packaging at atmospheric pressure. Characterization results of the device are presented.
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