Humidity Sensing Based on Ordered Porous Silicon for the Application on Fuel Cell 2008-01-0687
Porous silicon as gas/chemical sensing material has been widely investigated in recent years. In this paper, the humidity sensing property of n-type porous silicon with ordered structure is studied for the first time. The ordered porous silicon used in this experiment has uniform pore size, pore shape and distribution. Both the membrane and closed bottom samples were studied. The resistance change of the porous silicon was measured. A 22-28% decrease of resistance was observed when relative humidity was changed from 1% to 100%. Both the response time and the recovery time were within 10 minutes, and 90% of the response can be reached in 6 minutes for the PS membrane sample. The possible sensing mechanism and future work are also discussed in this paper.
Citation: Wang, Y. and Yeow, J., "Humidity Sensing Based on Ordered Porous Silicon for the Application on Fuel Cell," SAE Technical Paper 2008-01-0687, 2008, https://doi.org/10.4271/2008-01-0687. Download Citation
Author(s):
Yun Wang, John T. W. Yeow
Affiliated:
University of Waterloo
Pages: 7
Event:
SAE World Congress & Exhibition
ISSN:
0148-7191
e-ISSN:
2688-3627
Also in:
Nanotechnology for Automotive Applications - Nanomaterial for Energy Devices, 2008-SP-2177
Related Topics:
Humidity
Reaction and response times
Drag
Chemicals
Gases
Logistics
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