Enhanced Performance Silicon Pressure Sensors for Automotive Applications 970609
An automotive pressure transducer incorporating an ultra flexible mixed signal CMOS ASIC and a well established bulk-micromachined sensing element is presented demonstrating enhanced performance over the demanding automotive temperature specification.
Limited statistical knowledge of both the sensor and ASIC performance is shown to lead to much simplified calibration algorithms during high volume manufacture yielding low overall transducer errors.
Results are presented to demonstrate both the enhanced performance and ASIC flexibility. The advantages of custom design of a signal processing ASIC to a targeted range of pressure sensor die is clearly demonstrated.
Citation: Dancaster, J., Bowen, M., and Rastegar, A., "Enhanced Performance Silicon Pressure Sensors for Automotive Applications," SAE Technical Paper 970609, 1997, https://doi.org/10.4271/970609. Download Citation
Author(s):
John Dancaster, Mark Bowen, Ali Rastegar
Affiliated:
LucasVarity
Pages: 9
Event:
SAE International Congress and Exposition
ISSN:
0148-7191
e-ISSN:
2688-3627
Also in:
Sensors and Transducers-PT-68, Sensors and Actuators 1997-SP-1220
Related Topics:
Pressure
Sensors and actuators
Calibration
Mathematical models
Statistical analysis
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