A Novel Analysis and Design of Nano-CMM Main Body 2006-01-0771

Many types of three dimensional mechanism (3D-mechanism) are used in modern industry. Specially, in automation technology, coordinate measuring machines (CMMs) play the key role. With the improvement of measurement accuracy conventional coordinate measuring machine (CMM) can’t meet the demand of 3D measurements of fine parts, so Nano-CMM (Coordinate Measuring Machine with nanometer resolution) appears in the world. This paper presents a novel structure design of Nano-CMM. The new structure named symmetrical-bridge is developed based on the analysis of conventional Nano-CMM. Compared with Nano-CMMs called rectangular-bridge and arch-bridge, this new structure performs less static deformation and provides higher accuracy under the same load. The analysis and comparison of three Nano-CMMs were made through ANSYS software, so it can be easily concluded that this new structure not only has great static rigidity but also dynamic rigidity. Therefore, the superiority of this new structure is verified and the optimum design is finished.