Ultra High Pressure Sensor with MEMS Sensor Element Mounted on the Measurement Membrane Manufactured by MIM

Myounggun Jeon; Seunggu Lim; DongYoung Lee

doi:10.4271/2022-01-0417

This paper presents a ultra-high pressure sensor composed the measurement membrane manufactured by MIM (Metal Powder Injection Molding). The membrane should be sufficiently deformed within the measuring pressure range and not be broken at the burst pressure. Therefore, in general, the high pressure sensor membrane made of metal using machining methods such as milling and drilling. However, it requires additional process to assembly with other parts and is difficult to make complex structure such as screw. Thus, in this paper, we propose the product and design of the measurement membrane using the MIM method.

We have developed the ultra-high pressure sensor capable of measuring to 900 bar.gauge. Figure 1 shows the ultra-high pressure and measurement part. The measurement membrane thickness is 900 μm and diameter is 3.2 mm. The MEMS sensor element mounted on the measuring membrane surface outputs an electrical signal according to the pressure. And then, the electrical circuit with ASIC calibrates MEMS sensor element output and adjusts the output signal.

As a test result of the burst pressure, the proposed ultra-high pressure sensor is not broken and no leakage. And, in all temperature and pressure operating range, we can find the output tolerance is within about 1% F.S. Therefore, the ultra-high pressure sensor can be applicable to various system.

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Ultra High Pressure Sensor with MEMS Sensor Element Mounted on the Measurement Membrane Manufactured by MIM 2022-01-0417

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